JPH0275556U - - Google Patents
Info
- Publication number
- JPH0275556U JPH0275556U JP15445088U JP15445088U JPH0275556U JP H0275556 U JPH0275556 U JP H0275556U JP 15445088 U JP15445088 U JP 15445088U JP 15445088 U JP15445088 U JP 15445088U JP H0275556 U JPH0275556 U JP H0275556U
- Authority
- JP
- Japan
- Prior art keywords
- cross
- sample
- section
- ions
- atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 3
- 150000002500 ions Chemical class 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15445088U JPH0275556U (en]) | 1988-11-28 | 1988-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15445088U JPH0275556U (en]) | 1988-11-28 | 1988-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0275556U true JPH0275556U (en]) | 1990-06-08 |
Family
ID=31431189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15445088U Pending JPH0275556U (en]) | 1988-11-28 | 1988-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0275556U (en]) |
-
1988
- 1988-11-28 JP JP15445088U patent/JPH0275556U/ja active Pending
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